Research on Safe Detonation Chip Based on MEMS Technology
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摘要:针对MEMS火工品低能化带来的安全性问题,设计了一种基于MEMS工艺的安全起爆芯片,采用MEMS工艺制作了Ni-Cr换能元层、绝缘层、导线层,一体化集成了含平面开关的安全起爆芯片;通过对形貌、表面粗糙度、厚度等进行表征分析,确定了结构参数,并对安全起爆芯片性能进行了测试。结果表明MEMS平面开关实现了通断转换,可以提高安全起爆芯片的安全性。本研究为MEMS火工品安全性技术提供支撑。
Abstract:Aiming at the safe problem followed by the low energy of MEMS pyrotechnic, a safe detonation chip based on MEMS process was designed. The Ni-Cr heater, insulating layer and circuit layer were made by MEMS process, and the safe detonation chip with planar switch was integrated. The performance analyses of morphology, surface roughness, thickness, etc. were carried out, then the structural material parameters were determined, meanwhile, the performance of the safe detonation chip were tested. The results show that the MEMS switch realizes the on-off conversion, so the safety of the safe detonation chip can be improved. The study provides support for the safety technology of MEMS pyrotechnic products.
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