Review on High Voltage Switching Technology for In-Line Exploding Foil Initiator Systems
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摘要:高压开关作为爆炸箔起爆系统（EFI）的核心组件，直接影响系统的能量释放效率与可靠性。本文从高压开关的性能、分类及原理、集成化工艺3个维度综述了研究进展，分析了高压开关的结构设计及关键性能参数，并探讨了其集成化发展趋势。研究表明，气体/真空高压开关具有高耐压和抗辐射能力，但体积较大；半导体固态高压开关响应速度快，适合小型化，但环境适应性较差；集成式平面高压开关通过MEMS和LTCC工艺实现了高集成度与小型化，但仍需解决寿命和稳定性问题。未来研究应聚焦于耐高温材料与封装技术的开发，推动MEMS与LTCC工艺的融合，提升开关在极端环境下的可靠性和智能化水平，以满足武器系统和航天器对小型化、高性能火工装置的需求。
Abstract:As a core component of an exploding foil initiator (EFI) system, the high-voltage switch directly affects the system's energy release efficiency and reliability. This paper reviews the research progress from three dimensions: the performance, classification,working principles, and integrated manufacturing processes of high-voltage switches. It analyzes the structural design and key performance parameters of high-voltage switches and discusses their integration trends. Research indicates that gas/vacuum high-voltage switches offer high voltage resistance and radiation tolerance but are bulky. Solid-state semiconductor high-voltage switches feature fast response time and are suitable for miniaturization, yet they exhibit poor environmental adaptability. Integrated planar high-voltage switches achieve high integration and miniaturization through MEMS and LTCC processes but still face challenges in lifespan and stability. Future research should focus on developing high-temperature-resistant materials and packaging technologies, promoting the integration of MEMS and LTCC processes, and enhancing the reliability and intelligence of switches in extreme environments to meet the demand of weapon systems and spacecraft for miniaturized,high-performance explosive devices .
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