Preparation and Performance Research of Integrated Al Film Exploding Foil Initiators
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摘要:为了提高爆炸桥箔的换能效率以及爆炸箔起爆系统的起爆能力，采用Al膜作为爆炸箔金属桥膜，开展了集成化Al膜爆炸箔起爆器的制备工艺研究。对桥区尺寸为0.2~0.4 mm、厚度为5~8 μm的Al桥电爆炸性能进行测试，并在此基础上测试了驱动飞片速度。研究结果表明：200 W溅射功率、20 sccm氩气流速是制备Al膜的最佳工艺条件；1 000 V电压条件下，厚度为6 μm、桥区尺寸为0.35 mm×0.35 mm的桥箔电爆炸时爆发功率最大，相比相同输入能量的Cu桥，爆发功率提高14.3%，电能沉积率提高9.63%；桥区尺寸在0.2 ~0.4 mm时，飞片速度随桥区尺寸的增大而逐渐减小，桥区厚度为7 μm时飞片速度最大，1 000 V充电电压下达到4 100 m·s-1，高出Cu 桥7.89%。
Abstract:In order to increase the energy exchange efficiency of the exploding foil bridge and improve the initiation ability of the exploding foil initiation system, Al film was used as the exploding foil metal bridge film, and the preparation process of the integrated Al film exploding foil initiator was studied. The electrical explosion performance tests on Al bridges with dimension ranging from 0.2 mm to 0.4 mm and thickness ranging from 5 μm to 8 μm were conducted, the flyer velocity was tested on this basis. The results show that 200 W sputtering power and 20 sccm argon flow rate is the best process condition for preparing Al film; At 1 000 V voltage, the bridge foil with a thickness of 6 μm and a bridge area size of 0.35 mm×0.35 mm has the highest explosive power during electrical explosion , of which explosion power is 14.3% higher and deposition rate of electric energy is 9.63% higher than those of the Cu bridge with the same input energy ; When the bridge area size is 0.2 ~0.4 mm, the flyer velocity gradually decreases with the increase of the bridge area size, and the flyer with the bridge film thickness of 7 μm has the highest velocity under the charge voltage of 1 000 V, it can reach 4 100 m·s-1, which is 7.89% higher than that of Cu bridge.
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