硅基MEMS安执机构在微爆炸序列中的 应用与发展趋势
基金项目:
兵器集团开发费（SS2023080005）；精密微纳制造技术全国重点实验室（sklms 2024007）。
Application and Development Trend of Silicon-Based MEMS Safety and Arming Device in Micro-Explosive Train
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摘要:为适应各类信息化、智能化、微型化武器发展需求，以换能信息化、结构微型化、序列集成化为主要特点的MEMS火工品成为火工品技术发展的重要方向。MEMS安执机构作为MEMS火工品微爆炸序列能量传递的控制机构，是MEMS火工品设计的关键技术之一。本文基于微爆炸序列结构形式对硅基MEMS安执机构进行分类研究，分析不同安执机构的技术原理，探讨其应用进展与研究现状，总结硅基MEMS安执机构微型化、集成化、信息化、智能化发展趋势，为MEMS安执机构的研究与设计提供探讨。
Abstract:To meet the evolving development requirements of various informatized, intelligent and miniaturized weapons, MEMS pyrotechnics,distinguished primarily by their energy conversion informatization, structural miniaturization, and sequence integration capabilities, have emerged as a pivotal direction in the advancement of pyrotechnics technology. MEMS safety and arming device, serving as the energy transfer control mechanisms for micro-explosive train in MEMS pyrotechnics, is one of the key technologies in the design of MEMS pyrotechnics. This article conducted a classification study of silicon-based MEMS safety and arming devices from the perspective of micro-explosive train structures form, analyzed the technical principles of different actuators, explored their application progress and research status, and summarized the trends towards micro-miniaturization, integration, informatization and intelligent of silicon-based MEMS safety and arming devices. This article can provide new ideas for the research and design of MEMS safety and arming device.
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