Research on the Firing Performance of MEMS Integrated Exploding Foil Chip
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摘要:为了实现高速飞片输出和爆炸箔起爆器（Exploding Foil Initiator, EFI）低能发火，依据EFI工作原理，进行Cu桥箔电热仿真、PC（聚氯代对二甲苯）飞片冲击作用参数计算和SU-8加速膛结构确定。基于结构设计参数，采用微机电系统（Micro-Electro-Mechanical System, MEMS）工艺实现了爆炸箔芯片一体化批量制备，并开展了MEMS集成爆炸箔芯片的桥箔电爆特性、飞片实时速度和冲击起爆性能测试。结果表明：基于小尺寸桥箔结构在较低放电电压下就能够获得较高的飞片速度，并且在加速膛口飞片速度达到峰值速度的96%以上；冲击起爆HNS-IV药柱的最低发火条件为0.22 μF/1 100 V，实现了EFI低能发火。
Abstract:In order to achieve high-velocity flyer output and low energy ignition of the exploding foil initiator (EFI), the study on electro-thermal simulation of Cu bridge foil, impact parameters calculation of PC flyer, and dimensions determination of SU-8 barrel were conducted according to the working principle of EFI. The prototype exploding foil chip has been batch-prepared using micro-electro-mechanical system (MEMS) technology based on the structure design parameters. Furthermore, the primary characteristics of MEMS exploding foil chip were tested, including the foil electrical-explosion properties, real-time flyer velocities and impact initiation properties. The results show that based on a small-sized bridge foil structure, higher flyer velocity can be achieved at lower discharge voltage, and the flyer velocity at the SU-8 barrel muzzle reaches over 96% of its peak velocity; The minimum ignition condition for impact initiation of HNS-IV charges is 0.22 μF/1 100 V, which indicates EFI with low energy ignition has been achieved.
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