Study on the Energy Reduction of TaN Thin Film Transducers
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摘要:为了实现TaN薄膜换能元的低能化，设计制作了不同桥膜厚度、不同桥区尺寸、不同桥区形状的TaN薄膜换能元，依据GJB/z 377A-94感度试验用兰利法，对其进行了发火感度测试。结果表明：当桥区尺寸、形状一定时，随着桥膜厚度的增加，换能元的发火电压先减小后增加，当桥膜厚度为0.9μm时，发火电压最小。通过优化桥区尺寸和桥区形状，获得的TaN薄膜换能元最小平均发火电压低于5V。
Abstract:In order to realize the energy reduction of TaN thin film transducers, TaN thin film transducers with different bridge film thickness, different bridge sizes, and different bridge shapes were designed and manufactured. According to the Langley method for sensitivity test of GJB/z 377A-94, the ignition sensitivity test was performed. The results showed that when the size and shape of the bridge are constant, as the thickness of the bridge film increases, the firing voltage of the transducer element firstly decrease and then increase. When the thickness of the bridge film is 0.9μm, the firing voltage is the lowest. By optimizing the size and shape of the bridge, the minimum average firing voltage of the obtained TaN thin film transducer is below 5V.
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